Flexible Sputter Processes

IST International Surface Technology, Apr 2013

Springer Fachmedien Wiesbaden

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Flexible Sputter Processes

Flexible Sputter Processes 0 Contact: Hüttinger Elektronik GmbH A new generation of DC generators has been developed speci cally for high-quality sputter processes. The new generators have a wider range of settings, which makes them more exible and versatile and - The newly developed range of DC generators is ideally suited for use in sputter processes as part of the production of solar cells. Her of DC, medium-frequency and üttinger Elektronik, a manufacturhigh-frequency generators, has added the TruPlasma DC Series 3000 New range of DC generators to its product portfolio. e generators have a power output of 20, 30, 40 and 60 kW and are ideally suited to demanding sputter processes. e availability of models with di erent power outputs gives users even greater exibility. In addition to a wider range of different versions, the new family of generators has a number of technical innovations. At each power output level, the generators supply the full bandwidth of voltages and currents, which allows them to provide the necessary power without restrictions in the case of all types of process parameters. Regardless of the properties of the process, exactly the right amount of energy is always provided without waiting or changeover times. As a result, the generators help to make the production process even more e cient. Another bene t of the new models is the option of connecting in parallel several generators with the same power output. For example, two generators with an output of 40 kW can be used together to produce a power output of 80 kW. Users can also combine gener The DC generators allow for more exible production processes. ators with di erent power outputs, in order to ensure that the installed output meets their speci c requirements. e new models also use tried-andtested technology. The CompensateLine arc management system allows the generators to produce thin and uniform coatings even in processes where arcs constantly form. e energy stored in the output circuit and in the cable between the generator and the cathode is perfectly balanced, which enables the generator to react very quickly to the arc and reduces the residu

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Springer Fachmedien Wiesbaden. Flexible Sputter Processes, IST International Surface Technology, 2013, 40-40, DOI: 10.1365/s35724-013-0151-1