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The effects of argon ion bombardment on the corrosion resistance of tantalum

Application of ion beam has been widely used as a surface modification method to improve surface properties. This paper investigates the effect of argon ion implantation on surface structure as well as resistance against tantalum corrosion. In this experiment, argon ions with energy of 30 keV and in doses of 1 × 1017–10 × 1017 ions/cm2 were used. The surface bombardment with inert ...