Using the same materials for the cathode and anode in energy storage devices could greatly simplify the technological process and reduce the device cost significantly. In this paper, we assemble a dual carbon-based Li-ion capacitor with the active materials derived entirely from a single precursor, petroleum coke. For the anode, petroleum coke-derived carbon (PCC) is prepared by...
In this study, the growth kinetics of SiGe in a reduced pressure chemical vapor deposition system using dichlorosilane (SiH2Cl2) and germane (GeH4) as the Si and Ge precursors were investigated. The SiGe growth rate and Ge content were found to depend on the deposition temperature, GeH4 flow and reactor chamber pressure. The SiGe growth rate escalates with increasing deposition...
In this paper, we investigated the dose window of forming a continuous buried oxide (BOX) layer by single implantation at the implantation energy of 200 keV. Then, an improved two-step implantation process with second implantation dose of 3×1015 cm−2 was developed to fabricate high quality separation by implanted oxygen (SIMOX) silicon on insulator (SOI) wafers. Compared with...
