Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages

Frontiers of Mechanical Engineering, May 2019

Nano-precision positioning stages are characterized by rigid-flexible coupling systems. The complex dynamic characteristics of mechanical structure of a stage, which are determined by structural and dynamic parameters, exert a serious influence on the accuracy of its motion and measurement. Systematic evaluation of such influence is essential for the design and improvement of stages. A systematic approach to modeling the dynamic accuracy of a nano-precision positioning stage is developed in this work by integrating a multi-rigid-body dynamic model of the mechanical system and measurement system models. The influence of structural and dynamic parameters, including aerostatic bearing configurations, motion plane errors, foundation vibrations, and positions of the acting points of driving forces, on dynamic accuracy is investigated by adopting the H-type configured stage as an example. The approach is programmed and integrated into a software framework that supports the dynamic design of nano-precision positioning stages. The software framework is then applied to the design of a nano-precision positioning stage used in a packaging lithography machine.

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Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages

Frontiers of Mechanical Engineering pp 1–18 | Cite as Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages AuthorsAuthors and affiliations Chengyuan LiangFang YuanXuedong ChenWei JiangLizhan ZengXin Luo Open Access Research Article First Online: 02 May 2019 Part of the following topical collections:Innovative Design and Intelligent Design Abstract Nano-precision positioning stages are characterized by rigid-flexible coupling systems. The complex dynamic characteristics of mechanical structure of a stage, which are determined by structural and dynamic parameters, exert a serious influence on the accuracy of its motion and measurement. Systematic evaluation of such influence is essential for the design and improvement of stages. A systematic approach to modeling the dynamic accuracy of a nano-precision positioning stage is developed in this work by integrating a multi-rigid-body dynamic model of the mechanical system and measurement system models. The influence of structural and dynamic parameters, including aerostatic bearing configurations, motion plane errors, foundation vibrations, and positions of the acting points of driving forces, on dynamic accuracy is investigated by adopting the H-type configured stage as an example. The approach is programmed and integrated into a software framework that supports the dynamic design of nano-precision positioning stages. The software framework is then applied to the design of a nano-precision positioning stage used in a packaging lithography machine. Keywordsnano-precision positioning stage analysis and design structural and dynamic parameters dynamic accuracy systematic modeling  Download to read the full article text Notes Acknowledgements This work was partially supported by the National Science and Technology Major Project of China (Grant Nos. 2009ZX02204-006 and 2017ZX02101007-002) and the National Natural Science Foundation of China (Grant Nos. 51435006 and 51675195). References 1. ITRS. 2013 Edition, IRC Overview, International Technology Roadmap for SemiconductorsGoogle Scholar 2. Torralba M, Valenzuela M, Yagüe-Fabra J A, et al. Large range nanopositioning stage design: A three-layer and two-stage platform. Measurement, 2016, 89: 55–71CrossRefGoogle Scholar 3. Gao W, Kim S W, Bosse H, et al. Measurement technologies for precision positioning. CIRP Annals-Manufacturing Technology, 2015, 64(2): 773–796CrossRefGoogle Scholar 4. Smith S T, Chetwynd D G. Foundations of Ultraprecision Mechanism Design. London: Taylor & Francis e-Library, 2005Google Scholar 5. Schmidt R M, Schitter G, Eijk J V. The Design of High Performance Mechatronics: High-Tech Functionality by Multidisciplinary System Integration. Amsterdam: Delft University Press, 2011Google Scholar 6. Huo D, Cheng K, Wardle F. Design of Precision Machines in Machining Dynamics: Fundamentals, Applications and Practices. London: Springer, 2009Google Scholar 7. Huo D, Cheng K. A dynamics-driven approach to the design of precision machine tools for micro-manufacturing and its implementation perspectives. Proceedings of the Institution of Mechanical Engineers. Part B, Journal of Engineering Manufacture, 2008, 222(1): 1–13CrossRefGoogle Scholar 8. Huo D, Cheng K, Wardle F. A holistic integrated dynamic design and modelling approach applied to the development of ultraprecision micro-milling machines. International Journal of Machine Tools and Manufacture, 2010, 50(4): 335–343CrossRefGoogle Scholar 9. Srivatsan V, Katz R, Dutta D, et al. Dynamic error characterization for non-contact dimensional inspection systems. Journal of Manufacturing Science and Engineering, 2008, 130(5): 051003CrossRefGoogle Scholar 10. Chen D, Han J, Huo C, et al. Effect of gas slip on the behavior of the aerostatic guideway. Industrial Lubrication and Tribology, 2017, 69(4): 447–454CrossRefGoogle Scholar 11. Li Y, Wu Y, Gong H, et al. Air bearing center cross gap of neutron stress spectrometer sample table support system. Frontiers of Mechanical Engineering, 2016, 11(4): 403–411CrossRefGoogle Scholar 12. He X, Chen X. The dynamic analysis of the gas lubricated stage in optical lithography. International Journal of Advanced Manufacturing Technology, 2007, 32(9–10): 978–984CrossRefGoogle Scholar 13. Chen X, Li Z. Model reduction techniques for dynamics analysis of ultra-precision linear stage. Frontiers of Mechanical Engineering, 2009, 4(1): 64–70CrossRefGoogle Scholar 14. Bao X, Mao J. Dynamic modeling method for air bearings in ultra-precision positioning stages. Advances in Mechanical Engineering, 2016, 8(8): 1–9CrossRefGoogle Scholar 15. Denkena B, Dahlmann D, Sassi N. Analysis of an ultra-precision positioning system and parametrization of its structural model for error compensation. Procedia CIRP, 2017, 62: 335–339CrossRefGoogle Scholar 16. Li W, Li B, Yang J. Design and dynamic optimization of an ultra-precision micro grinding machine tool for flexible joint blade machining. International Journal of Advanced Manufacturing Technology, 2017, 93(9–12): 3135–3147CrossRefGoogle Scholar 17. Kim K, Ahn D, Gweon D. Optimal design of a 1-rotational DOF flexure joint for a 3-DOF H-type stage. Mechatronics, 2012, 22(1): 24–32CrossRefGoogle Scholar 18. Erkorkmaz K, Gorniak J M, Gordon D J. Precision machine tool X-Y stage utilizing a planar air bearing arrangement. CIRP Annals-Manufacturing Technology, 2010, 59(1): 425–428CrossRefGoogle Scholar 19. Chen R, Yan L, Jiao Z, et al. Dynamic modeling and analysis of flexible H-type gantry stage. Journal of Sound and Vibration, 2019, 439: 144–155CrossRefGoogle Scholar 20. Kilikevičius A, Kasparaitis A. Dynamic research of multi-body mechanical systems of angle measurement. International Journal of Precision Engineering and Manufacturing, 2017, 18(8): 1065–1073CrossRefGoogle Scholar 21. Zhou B, Wang S, Fang C, et al. Geometric error modeling and compensation for five-axis CNC gear profile grinding machine tools. International Journal of Advanced Manufacturing Technology, 2017, 92(5–8): 2639–2652CrossRefGoogle Scholar 22. Guo S, Jiang G, Mei X. Investigation of sensitivity analysis and compensation parameter optimization of geometric error for five-axis machine tool. International Journal of Advanced Manufacturing Technology, 2017, 93(9–12): 3229–3243CrossRefGoogle Scholar 23. Chen J X, Lin S W, Zhou X L. A comprehensive error analysis method for the geometric error of multi-axis machine tool. International Journal of Machine Tools and Manufacture, 2016, 106: 56–66CrossRefGoogle Scholar 24. Tian W, Gao W, Zhang D, et al. A general approach for error modeling of machine tools. International Journal of Machine Tools and Manufacture, 2014, 79: 17–23CrossRefGoogle Scholar 25. Zhang Z, Liu Z, Cheng Q, et al. An approach of comprehensive error modeling and accuracy allocation for the improvement of reliability and optimization of cost of a multi-axis NC machine tool. International Journal of Advanced Manufacturing Technology, 2017, 89(1–4): 561–579CrossRefGoogle Scholar 26. Cheng Q, Zhang Z, Zhang G, et al. Geometric accuracy allocation for multi-axis CNC machine tools based on sensitivity analysis and reliability theory. Proceedings of the Institution of Mechanical Engineers. Part C, Journal of Mechanical Engineering Science, 2015, 229(6): 1134–1149CrossRefGoogle Scholar 27. Liu Y, Yuan M, Cao J, et al. Evaluation of measurement uncertainty in H-drive stage during high acceleration based on Monte Carlo method. International Journal of Machine Tools and Manufacture, 2015, 93: 1–9CrossRefGoogle Scholar 28. Gao Z, Hu J, Zhu Y, et al. The research on geometric error’s tolerance design of X-Y stage’s measurement system accuracy. Transactions of the Institute of Measurement and Control, 2013, 35(5): 672–682CrossRefGoogle Scholar 29. Gao Z, Hu J, Zhu Y, et al. A new 6-degree-of-freedom measurement method of X-Y stages based on additional information. Precision Engineering, 2013, 37(3): 606–620CrossRefGoogle Scholar 30. Du S, Hu J, Zhu Y, et al. Analysis and compensation of synchronous measurement error for multi-channel laser interferometer. Measurement Science and Technology, 2017, 28(5): 055201CrossRefGoogle Scholar 31. Teng W, Zhou Y F, Mu H H, et al. An algorithm on laser measurement model of ultra-precision motion stage and error compensation. China Mechanical Engineering, 2009, 20(12): 1492–1497 (in Chinese)Google Scholar 32. Wen X, Zhou Y F, Mu H H, et al. An algorithm for the compensation of geometrical error in laser interferometer measurement. Machinery Design & Manufacture, 2011, (9): 46–48 (in Chinese)Google Scholar 33. Liu C, Pu Y, Chen Y, et al. Design of a measurement system for simultaneously measuring six-degree-of-freedom geometric errors of a long linear stage. Sensors, 2018, 18(11): 3875CrossRefGoogle Scholar 34. Liang C Y, Luo X, Chen X D. Generating equivalent models of aerostatic bearings for precise positioning stage design in a knowledge-based framework. In: Proceedings of 2015 Advanced Design Concepts and Practice. Lancaster: Destech Publications, 2016, 138–148Google Scholar 35. Chen X D, Zhu J C, Chen H. Dynamic characteristics of ultra-precision aerostatic bearings. Advances in Manufacturing, 2013, 1(1): 82–86CrossRefGoogle Scholar 36. Agilent Technologies. Agilent Laser and Optics User’s Manual, Volume II. 2007Google Scholar 37. Fan K C, Chen M J A. 6-degree-of-freedom measurement system for the accuracy of X-Y stages. Precision Engineering, 2000, 24(1): 15–23CrossRefGoogle Scholar Copyright information © The Author(s) 2019 Open AccessThis article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/. Authors and Affiliations Chengyuan Liang1Fang Yuan1Xuedong Chen1Wei Jiang1Lizhan Zeng1Xin Luo1Email author1.State Key Laboratory of Digital Manufacturing Equipment and TechnologyHuazhong University of Science and TechnologyWuhanChina


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Chengyuan Liang, Fang Yuan, Xuedong Chen, Wei Jiang, Lizhan Zeng, Xin Luo. Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages, Frontiers of Mechanical Engineering, 2019, 1-18, DOI: 10.1007/s11465-019-0538-x