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Search: authors:"A-Ling He"

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Structure and properties of indium-doped ZnO films prepared by RF magnetron sputtering under different pressures

High conductive and transparent In-doped ZnO thin films were deposited on glass substrates by radio-frequency (RF) magnetron sputtering at 250 °C. Argon gas was used as the sputtering gas, and its pressure varies from 0.1 to 4.0 Pa. The influences of deposition pressure on the structural, electrical and optical properties of the films were investigated by means of X-ray...