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Search: authors:"Chengyuan Liang"

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Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages

Nano-precision positioning stages are characterized by rigid-flexible coupling systems. The complex dynamic characteristics of mechanical structure of a stage, which are determined by structural and dynamic parameters, exert a serious influence on the accuracy of its motion and measurement. Systematic evaluation of such influence is essential for the design and improvement of...