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Effects of Additional Oxygen Flow on the Optical and Electrical Properties of Ion Beam Sputtering Deposited Molybdenum-Doped Zinc Oxide Layer

-Tang Chang,3 and Ju-Liang He2 1Department of Mechanical Engineering, Chien Kuo Technology University, Changhua City 500, Taiwan 2Department of Materials Science and Engineering, Feng Chia University

Effects of Additional Oxygen Flow on the Optical and Electrical Properties of Ion Beam Sputtering Deposited Molybdenum-Doped Zinc Oxide Layer

-Tang Chang,3 and Ju-Liang He2 1Department of Mechanical Engineering, Chien Kuo Technology University, Changhua City 500, Taiwan 2Department of Materials Science and Engineering, Feng Chia University

The Influences of Thickness on the Optical and Electrical Properties of Dual-Ion-Beam Sputtering-Deposited Molybdenum-Doped Zinc Oxide Layer

The thickness of transparent conductive oxide (TCO) layer significantly affects not only the optical and electrical properties, but also its mechanical durability. To evaluate these influences on the molybdenum-doped zinc oxide layer deposited on a flexible polyethersulfone (PES) substrate by using a dual-ion-beam sputtering system, films with various thicknesses were prepared at...