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8 papers found.
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Wafer-Scale Fabrication of Sub-10 nm TiO2-Ga2O3 n-p Heterojunctions with Efficient Photocatalytic Activity by Atomic Layer Deposition

Wafer-scale, conformal, two-dimensional (2D) TiO2-Ga2O3 n-p heterostructures with a thickness of less than 10 nm were fabricated on the Si/SiO2 substrates by the atomic layer deposition (ALD) technique for the first time with subsequent post-deposition annealing at a temperature of 250 °C. The best deposition parameters were established. The structure and morphology of 2D TiO2...

Fabrication of Si-based three-dimensional microbatteries: A review

High-performance, Si-based three-dimensional (3D) microbattery systems for powering micro/nanoelectromechanical systems and lab-on-chip smart electronic devices have attracted increasing research attention. These systems are characterized by compatible fabrication and integratibility resulting from the silicon-based technologies used in their production. The use of support...

Microscopic mechanisms of deformation transfer in high dynamic range branched nanoparticle deformation sensors

in:Nature Research journals • PubMed • Google Scholar Search for Matthew R. Jones in:Nature Research journals • PubMed • Google Scholar Search for Liwei Lin in:Nature Research journals • PubMed • Google

3D-printed microelectronics for integrated circuitry and passive wireless sensors

Center (BSAC), University of California, Berkeley, CA 94720, USA Sung-Yueh Wu, Chen Yang & Liwei Lin AuthorsSearch for Sung-Yueh Wu in:Nature Research journals • PubMed • Google ScholarSearch for Chen Yang ... in:Nature Research journals • PubMed • Google ScholarSearch for Wensyang Hsu in:Nature Research journals • PubMed • Google ScholarSearch for Liwei Lin in:Nature Research journals • PubMed • Google Scholar

Resonant-frequency tuning of angular vertical comb-driven microscanner

The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon. A tuning electrode is fabricated to be electrically separated from the actuation electrode to tune the resonant...

Rapid assembly of multilayer microfluidic structures via 3D-printed transfer molding and bonding

. Zhuang Joseph C. Lin Roseanne H. Warren Dennis R. Tekell Panitan A. Satamalee Liwei Lin A critical feature of state-of-the-art microfluidic technologies is the ability to fabricate multilayer structures

Micromachined W-band polymeric tunable iris filter

A tunable filter working in the W-band spectrum has been successfully demonstrated using a combined plastic molding and electroplating process. The prototype filter architecture has two deformable membranes of 1.6 mm in diameter on top of a WR-10 waveguide based, two-cavity, polymeric iris filter. The membranes can be actively adjusted to deform and alter the cavity geometry...