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Search: authors:"Yutaka Furubayashi"

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New Insights on Factors Limiting the Carrier Transport in Very Thin Amorphous Sn-Doped In2O3 Films with High Hall Mobility

We demonstrated that a mass density and size effect are dominant factors to limit the transport properties of very thin amorphous Sn-doped In2O3 (a-ITO) films. a-ITO films with various thicknesses (t) ranging from 5 to 50 nm were deposited on non-alkali glass substrates without intentional heating of the substrates by reactive plasma deposition with direct-current arc discharge...