Microsystems & Nanoengineering

Microsystems & Nanoengineering is an online-only, open access international journal devoted to publishing original research results and reviews on all aspects of Micro and Nano Electro Mechanical Systems from fundamental to applied research. The journal is published by Springer Nature in partnership with the Aerospace Information Research Institute, Chinese Academy of Sciences, supported by the State Key Laboratory of Transducer Technology.

List of Papers (Total 1,357)

Tesla-scale magnetic field measurement based on Sideband-overlap Zeeman spectroscopy using a functionalized MEMS vapor cell

Accurate measurement of strong magnetic fields in the Tesla range remains a persistent challenge due to calibration drift, nonlinearity, and spatial gradient sensitivity. Here, we present a compact magnetometry approach based on sideband-overlap Zeeman spectroscopy, enabled by a functionalized MEMS cesium vapor cell. The vapor cell features a dual-chamber glass–Si–glass structure...

Frequency-angle decoupling design for grid-etched piezoelectric MEMS cantilevers and its application to quasi-static micromirrors

Micro-electro-mechanical systems (MEMS) cantilever actuators are pivotal in applications ranging from micro-optics to precision manipulation. However, their performance is fundamentally constrained by a trade-off between dynamic response and static deformation. To address this limitation, this paper presents a segmented grid-etched technique for MEMS cantilever actuators that...

Integrated precise temperature regulation and electrophysiology sensing system for nanoplasmonic photothermal cardiac bradyarrhythmia therapy

Bradyarrhythmia is a potentially life-threatening disease. Current pharmacological and surgical treatments are limited by side effects and invasiveness, with an urgent need for safer and noninvasive therapeutic strategies. In this study, we develop a multifunctional regulating-sensing platform that integrates precise temperature regulation with simultaneous electrophysiological...

Intelligent label-free droplet microfluidic sorting system for single-cell encapsulation and morphology-guided screening

The label-free extraction of cellular morphological data from within droplet microenvironments, and its subsequent translation into reliable, high-precision sorting, continues to pose a central challenge in the field of droplet microfluidics. Here, we develop an intelligent label-free droplet sorting (ILFDS) system by integrating droplet microfluidics, real-time image recognition...

MEMS electrochemical angular accelerometer: a paradigm shift for attitude detection and control in rotorcraft UAVs

Angular acceleration plays a very critical role for the dynamic control of the accurate attitude estimation of the unmanned aerial vehicles (UAVs), which is conventionally acquired by the differentiation of the gyroscope signals. However, this indirect derivation inherently introduces detrimental phase lags and amplifies noise, thereby compromising the control stability of flight...

Nanoimprinting of pressure-intolerant tilted nanostructures assisted by an electric field for high performance optical coupler

Tilted nanostructures, with their unique light-modulating capabilities, find broad applications in optical fields such as optical couplers, and escalating performance demands of devices impose formidable challenges regarding structural fidelity and fabrication cost-effectiveness, owing to their inherent pressure-intolerant properties. Here, a novel electric-field-assisted...

Advances in silicon carbide pressure sensors for high-temperature extreme environment sensing

In fields such as aerospace, geothermal energy, Venus exploration, and nuclear power safety, large-scale equipment often operates under extreme conditions characterized by high temperatures, radiation, corrosive gases, and vibration. Pressure monitoring at critical locations is essential for equipment condition monitoring, fault diagnosis, and improving operational efficiency...

A wearable paper-based SGR/MCC microneedle array sensor for continuous glucose monitoring

Continuous glucose monitoring (CGM) is a promising approach for managing blood glucose levels in individuals with diabetes. However, the emerging microneedle (MN) technologies for colorimetric or electrochemical detection of glucose in sampled dermal interstitial fluid (ISF) remain far from practical CGM due to many concerns. Herein, we propose a new disposable solid MN array on...

A smartphone-powered decentralized microfluidic platform for sensitive CRISPR-based nucleic acid detection

Sensitive, portable, and low-cost nucleic acid detection without need for complicated equipment or trained operators, allows flexibility in forward (i.e., near the point of collection) detection and diagnostics that could be applied in resource-limited settings. To this end, we developed a microfluidic, chip-based laser-induced graphene (LIG) heater with precise temperature...

Universal bioinspired adhesives for arbitrary unknown surfaces toward dexterous robotic manipulation

Dexterous robotic hands are pivotal for complex manipulation in unstructured environments, yet they face significant challenges in reliably grasping fragile, heavy, or irregularly shaped objects using conventional friction-based methods. Gecko-inspired adhesion technology presents a compelling alternative, yet remain challenge in achieving reliable adhesion across arbitrary...

Sensitive and wafer-scale olfactory sensory neurons

Accurate and energy-efficient gas sensing remains a key challenge for next-generation artificial olfactory systems, particularly in applications such as unmanned aerial vehicles, wearable electronics, and humanoid robotic actuators. Inspired by the inherent selectivity and low-power information-processing mechanisms of biological olfactory neurons, we report an integrated...

Contact-induced continuous electricity generation by ion-electron positive feedback coupled transport for self-powered ionic touch panel

Ionic touch panels are regarded as a key platform for future human-computer interaction and meta-universe due to their stretchable, transparent and skin-fitting properties. Inspired by the fact that human skin relies on ionic current to sense contact position information, we have investigated an ionogel based closed-loop electrical system that also converts contact into ionic...

Seal whisker-inspired fully printed MEMS flow sensor via micron-scale soft material additive manufacturing

Seals are renowned for their exceptional ability to hunt, a capability attributed to the uniquely evolved whisker morphology that suppresses vortex-induced vibrations and enables them to track hydrodynamic trails in the water. In this study, we present the first direct experimental comparison of replicated whisker geometries from harbor seals, gray seals, and sea lions...

Detection of mitochondrial bioenergetics using a novel bimodal 3D microelectrode array (MEA)-based biosensor

Developing new label-free paradigms for functional assays in biomedical research has the potential to catalyze efforts in drug discovery and improve the understanding of complex disorders. Mitochondria are an essential organelle in nearly every eukaryotic organism that perform vital functions such as adenosine triphosphate (ATP) production, redox signaling, reactive oxygen...

Three-phase ScAlN-based PMUT-driven acoustic streaming micropump

Scandium-doped aluminum nitride (ScAlN)-based piezoelectric micromachined ultrasonic transducer (PMUT) arrays have attracted increasing attention in acoustofluidics for micro total analysis systems (μTAS), particularly for applications involving acoustic radiation force for bioparticle manipulation and cell manipulation. However, their use for fluid handling via acoustic...

Compact adaptive spectral imager enabled by MEMS Fabry-Perot filtering chip in longwave infrared

Longwave infrared (LWIR) spectral imaging offers unique capabilities for gas/liquid detection, mineral exploration, environmental monitoring, and military security applications. Conventional LWIR spectral imagers, however, are hampered by reliance on existing dispersion elements, resulting in inflexible operation, limited spectral channels, and excessive bulk, which preclude...

A Rapid-prototyping CMOS-RRAM Integration Strategy

Moore’s law has long served the semiconductor industry as the driving force for producing ever-advancing electronics technologies. However, given the economic implications and technological challenges associated with the present semiconductor scaling constraints, a shift from a traditional more Moore approach to a beyond Moore paradigm is desirable for sustaining the current pace...

High-uniformity miniaturized PMUT array with broadband and high-sensitivity for wearable ultrasound imaging

Among the diverse ultrasound transducers deployed in wearable continuous imaging applications, piezoelectric micromachined ultrasonic transducer (PMUT), developed via microelectromechanical system (MEMS) technology, exhibit significant potential for wearable use, owing to their device miniaturization and low power consumption. However, PMUT arrays often suffer from poor imaging...

Multi-target positioning and motion tracking enabled by a compound meta-eye system

Accurate perception of spatial position is essential for both biological vision and intelligent unmanned systems. Existing radio-based positioning approaches are susceptible to interference and require bulky infrastructures, while optical systems often trade accuracy for compactness. Here, we present a compound meta-eye system (CMES) that integrates an array of metalens sub-eyes...

Extending the boundaries of ultraviolet-visible meta-optics via direct imprinting of tantalum pentoxide composite

Broadband metasurfaces capable of precise electromagnetic wave control from the ultraviolet (UV) to the visible range enable applications such as multispectral imaging, secure multi-band optical encryption, and multi-spectral microscopy. However, realizing scalable UV-visible broadband metasurfaces remains challenging due to the subwavelength critical dimensions and high aspect...

Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology

As the core sensitive element of high-precision inertial navigation systems, the Q-factor and frequency splitting of the micro hemispherical resonator gyroscope (mHRG) are critical determine the performance of the inertial measurement unit (IMU). However, the continuous films formed by traditional coating processes introduce significant damping, leading to a substantial decrease...

Multilayered microelectrode array for monitoring electrophysiological signals of 3d neural networks in cerebral organoid

Microelectrode arrays (MEAs) are widely used platforms for monitoring neuronal activity in biological systems. The advent of brain organoid technology—three-dimensional (3D) neural tissue models derived from human stem cells—has opened unprecedented opportunities to study network connectivity and developmental processes of brain-like tissues in vitro. However, most commercial...

A curved-beam piezoelectric MEMS resonator featuring multiple temperature plateaus with enhanced stability

Silicon-based Micro-electromechanical Systems (MEMS) resonators face stability challenges due to their temperature susceptibility, which impedes the advancement towards high-precision applications. This work reports a multi-modal curved-beam piezoelectric resonator that enhances frequency stability through engineered irregular geometry and mechanical nonlinearity. Utilizing a...

Deep learning-driven performance prediction and design of high-DoF MEMS resonators

The design of microelectromechanical systems (MEMS) resonators has long been hindered by high computational costs and restricted structural degrees of freedom. This study introduces a structural design framework based on a residual network-enabled solver (ResNES) for rapid physical performance prediction and efficient optimization of MEMS resonators. The resonant frequencies of...