Accurate measurement of strong magnetic fields in the Tesla range remains a persistent challenge due to calibration drift, nonlinearity, and spatial gradient sensitivity. Here, we present a compact magnetometry approach based on sideband-overlap Zeeman spectroscopy, enabled by a functionalized MEMS cesium vapor cell. The vapor cell features a dual-chamber glass–Si–glass structure...
Micro-electro-mechanical systems (MEMS) cantilever actuators are pivotal in applications ranging from micro-optics to precision manipulation. However, their performance is fundamentally constrained by a trade-off between dynamic response and static deformation. To address this limitation, this paper presents a segmented grid-etched technique for MEMS cantilever actuators that...
Bradyarrhythmia is a potentially life-threatening disease. Current pharmacological and surgical treatments are limited by side effects and invasiveness, with an urgent need for safer and noninvasive therapeutic strategies. In this study, we develop a multifunctional regulating-sensing platform that integrates precise temperature regulation with simultaneous electrophysiological...
The label-free extraction of cellular morphological data from within droplet microenvironments, and its subsequent translation into reliable, high-precision sorting, continues to pose a central challenge in the field of droplet microfluidics. Here, we develop an intelligent label-free droplet sorting (ILFDS) system by integrating droplet microfluidics, real-time image recognition...
Angular acceleration plays a very critical role for the dynamic control of the accurate attitude estimation of the unmanned aerial vehicles (UAVs), which is conventionally acquired by the differentiation of the gyroscope signals. However, this indirect derivation inherently introduces detrimental phase lags and amplifies noise, thereby compromising the control stability of flight...
Tilted nanostructures, with their unique light-modulating capabilities, find broad applications in optical fields such as optical couplers, and escalating performance demands of devices impose formidable challenges regarding structural fidelity and fabrication cost-effectiveness, owing to their inherent pressure-intolerant properties. Here, a novel electric-field-assisted...
In fields such as aerospace, geothermal energy, Venus exploration, and nuclear power safety, large-scale equipment often operates under extreme conditions characterized by high temperatures, radiation, corrosive gases, and vibration. Pressure monitoring at critical locations is essential for equipment condition monitoring, fault diagnosis, and improving operational efficiency...
Continuous glucose monitoring (CGM) is a promising approach for managing blood glucose levels in individuals with diabetes. However, the emerging microneedle (MN) technologies for colorimetric or electrochemical detection of glucose in sampled dermal interstitial fluid (ISF) remain far from practical CGM due to many concerns. Herein, we propose a new disposable solid MN array on...
Sensitive, portable, and low-cost nucleic acid detection without need for complicated equipment or trained operators, allows flexibility in forward (i.e., near the point of collection) detection and diagnostics that could be applied in resource-limited settings. To this end, we developed a microfluidic, chip-based laser-induced graphene (LIG) heater with precise temperature...
Dexterous robotic hands are pivotal for complex manipulation in unstructured environments, yet they face significant challenges in reliably grasping fragile, heavy, or irregularly shaped objects using conventional friction-based methods. Gecko-inspired adhesion technology presents a compelling alternative, yet remain challenge in achieving reliable adhesion across arbitrary...
Accurate and energy-efficient gas sensing remains a key challenge for next-generation artificial olfactory systems, particularly in applications such as unmanned aerial vehicles, wearable electronics, and humanoid robotic actuators. Inspired by the inherent selectivity and low-power information-processing mechanisms of biological olfactory neurons, we report an integrated...
Ionic touch panels are regarded as a key platform for future human-computer interaction and meta-universe due to their stretchable, transparent and skin-fitting properties. Inspired by the fact that human skin relies on ionic current to sense contact position information, we have investigated an ionogel based closed-loop electrical system that also converts contact into ionic...
Seals are renowned for their exceptional ability to hunt, a capability attributed to the uniquely evolved whisker morphology that suppresses vortex-induced vibrations and enables them to track hydrodynamic trails in the water. In this study, we present the first direct experimental comparison of replicated whisker geometries from harbor seals, gray seals, and sea lions...
Developing new label-free paradigms for functional assays in biomedical research has the potential to catalyze efforts in drug discovery and improve the understanding of complex disorders. Mitochondria are an essential organelle in nearly every eukaryotic organism that perform vital functions such as adenosine triphosphate (ATP) production, redox signaling, reactive oxygen...
Scandium-doped aluminum nitride (ScAlN)-based piezoelectric micromachined ultrasonic transducer (PMUT) arrays have attracted increasing attention in acoustofluidics for micro total analysis systems (μTAS), particularly for applications involving acoustic radiation force for bioparticle manipulation and cell manipulation. However, their use for fluid handling via acoustic...
Longwave infrared (LWIR) spectral imaging offers unique capabilities for gas/liquid detection, mineral exploration, environmental monitoring, and military security applications. Conventional LWIR spectral imagers, however, are hampered by reliance on existing dispersion elements, resulting in inflexible operation, limited spectral channels, and excessive bulk, which preclude...
Moore’s law has long served the semiconductor industry as the driving force for producing ever-advancing electronics technologies. However, given the economic implications and technological challenges associated with the present semiconductor scaling constraints, a shift from a traditional more Moore approach to a beyond Moore paradigm is desirable for sustaining the current pace...
Among the diverse ultrasound transducers deployed in wearable continuous imaging applications, piezoelectric micromachined ultrasonic transducer (PMUT), developed via microelectromechanical system (MEMS) technology, exhibit significant potential for wearable use, owing to their device miniaturization and low power consumption. However, PMUT arrays often suffer from poor imaging...
Accurate perception of spatial position is essential for both biological vision and intelligent unmanned systems. Existing radio-based positioning approaches are susceptible to interference and require bulky infrastructures, while optical systems often trade accuracy for compactness. Here, we present a compound meta-eye system (CMES) that integrates an array of metalens sub-eyes...
Broadband metasurfaces capable of precise electromagnetic wave control from the ultraviolet (UV) to the visible range enable applications such as multispectral imaging, secure multi-band optical encryption, and multi-spectral microscopy. However, realizing scalable UV-visible broadband metasurfaces remains challenging due to the subwavelength critical dimensions and high aspect...
As the core sensitive element of high-precision inertial navigation systems, the Q-factor and frequency splitting of the micro hemispherical resonator gyroscope (mHRG) are critical determine the performance of the inertial measurement unit (IMU). However, the continuous films formed by traditional coating processes introduce significant damping, leading to a substantial decrease...
Microelectrode arrays (MEAs) are widely used platforms for monitoring neuronal activity in biological systems. The advent of brain organoid technology—three-dimensional (3D) neural tissue models derived from human stem cells—has opened unprecedented opportunities to study network connectivity and developmental processes of brain-like tissues in vitro. However, most commercial...
Silicon-based Micro-electromechanical Systems (MEMS) resonators face stability challenges due to their temperature susceptibility, which impedes the advancement towards high-precision applications. This work reports a multi-modal curved-beam piezoelectric resonator that enhances frequency stability through engineered irregular geometry and mechanical nonlinearity. Utilizing a...
The design of microelectromechanical systems (MEMS) resonators has long been hindered by high computational costs and restricted structural degrees of freedom. This study introduces a structural design framework based on a residual network-enabled solver (ResNES) for rapid physical performance prediction and efficient optimization of MEMS resonators. The resonant frequencies of...