Erratum to: Growth Behavior of Cubic Boron Nitride (cBN) Phase in B-C-N Film Deposited on Si Substrate with Non-Uniform Ion Flux
Met. Mater. Int.,
doi: 10.1007/s12540-013-3036-4
ERRATUM
Erratum to: Growth Behavior of Cubic Boron Nitride (cBN) Phase in B-C-N
Film Deposited on Si Substrate with Non-Uniform Ion Flux
Seung-Min Lee, Tae-Yeon Seong, Wook-Seong Lee, Young-Joon Baik, and Jong-Keuk Park
Erratum to: Met. Mater. Int., Vol. 19, No. 3, pp. 591-595 (2013)
doi: 10.1007/s12540-013-3031-9
On page 591, first paragraph, 3rd to 10th line, the following
sentence should be now read as: In contrast to the diamond
thin film with sp3-bonding which has been deposited by
chemical vapor deposition (CVD) with a mixed gas of carbon source and hydrogen at a high temperature over 800 °C,
the cBN phase has been mainly synthesized by physical
vapor deposition (PVD) with an energetic ion source at a
lower temperature below 600 °C, as in the case of transition
metal (carbo) nitride coatings [14].
The online version of the original article can be found at
http://dx.doi.org/ doi: 10.1007/s12540-013-3031-9
©KIM and Springer
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